micro-electromechanical systems

  • Japan advances in the development of "perfect" humanoids

    Japan’s most prestigious educational institution, the University of Tokyo, and semiconductor company Matsushita Electric Industrial (Panasonic), today unveiled an ultrasensitive sensor for robot use. The prototype was produced based on MEMS (micro-electromechanical systems) nanotechnology and is as small as a bread crumb. It’s made of silicon and covered with elastic rubber. Read More